MEMS BASED TEMPERATURE TO VOLTAGE CONVERTER

Authors

  • Dr. M.Saravanan Department of Electronics and Instrumentation Engineering Sree Vidyanikethan Engineering College A.Rangampet, Tirupati
  • G.V.Sunil Kumar Department of Electronics and Instrumentation Engineering Sree Vidyanikethan Engineering College A.Rangampet, Tirupati

DOI:

https://doi.org/10.53555/eijse.v3i2.65

Keywords:

MEMS, Thermal Microactuator, Comsol Multiphysics

Abstract

Source of energy for the MEMS devices became the unavoidable requirement for any application. Even though many renewable energy sources are available, the optimal utilization of those resources are not attained till now. This paper presents a design and implementation of Passive MEMS based voltage generation using temperature. The design is made with two stages, in the first part the temperature is converted to displacement using Micro actuators and then in the second stage the displacement is converted to pressure and then to voltage using piezoelectric sensors. It is simulated using COMSOL multiphysics software at a temperature of 100o C. 

References

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Published

2017-06-27

Issue

Vol. 3 No. 2 (2017): EPH - International Journal of Science And Engineering (ISSN: 2454 - 2016)

Section

Articles

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Copyright (c) 2017 EPH - International Journal of Science And Engineering (ISSN: 2454 - 2016)

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